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A. N. Shatokhin, F. N. Putilin, M. N. Roumiantseva, A. M. Gaskov

Study of energy characteristics and deposition rate of metal films from vacuum laser plasma on dielectric substrates

Abstract

Influence of pulse energy density Kr–F-laser on processes laser plasma generation of tin, palladium and platinum, deposition rate of metal films on dielectric substrates is investigated at laser ablation. Application of methods of differential probe of laser plasma with cylinders Faraday and the linear electrostatic mass-spectrometer has allowed to allocate in ionic signals of plasma of single-charged and multi-charged the ions differing on kinetic energy. It is shown, that deposition rate of films depends as on energy density of the laser, and a level of ionization of laser plasma.
Moscow University Chemistry Bulletin.
2007, Vol. 48, No. 4, P. 271
   

Copyright (C) Chemistry Dept., Moscow State University, 2002
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