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V. N. Varakin, Yu. Ya. Kuzyakov
Application of pyroelectric
detector to study the carbon nitride film synthesis by pulsed laser deposition
method
Abstract
For the
first time, a fast pyroelectric detector was used to study processes of film
synthesis by pulsed laser deposition (PLD) method. The measurements were
carried under actual conditions of carbon nitride film production. The dynamics
of species deposition and induced by them substrate heating has been studied.
In the double-pulse mode of PLD, an efficient delivery precursor molecules from
gas-phase onto the substrate and a new channel of CN molecule synthesis have
been shown to be realized.
Copyright (C) Chemistry Dept., Moscow State University, 2002
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